Extreme ultraviolet lithography

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Extreme ultraviolet lithography

Quality:

Extreme ultraviolet lithography - a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.. Article “Extreme ultraviolet lithography” in English Wikipedia has 100 points for quality (as of July 1, 2025). The article contains 421 references and 42 sections.

In this language version of Wikipedia the article has the best quality. Also, this article is the most popular in that (English) language version.

In June 2025 the article “Extreme ultraviolet lithography” was edited by 5 authors in English Wikipedia and written by 8 authors in all languages.

Since the creation of article “Extreme ultraviolet lithography”, its content was written by 165 registered users of English Wikipedia and edited by 355 registered Wikipedia users in all languages.

The article is cited 81 times in English Wikipedia and cited 295 times in all languages.

The highest Authors Interest rank from 2001:

  • Local (English): #4958 in June 2017
  • Global: #16749 in March 2019

The highest popularity rank from 2008:

  • Local (English): #48132 in September 2023
  • Global: #49068 in September 2023

There are 16 language versions for this article in the WikiRank database (of the considered 55 Wikipedia language editions).

The quality and popularity assessment was based on Wikipédia dumps from July 1, 2025 (including revision history and pageviews for previous years).

The table below shows the language versions of the article with the highest quality.

Languages with the highest quality

#LanguageQuality gradeQuality score
1English (en)
Extreme ultraviolet lithography
100
2Spanish (es)
Litografía ultravioleta extrema
100
3Russian (ru)
Фотолитография в глубоком ультрафиолете
67.0605
4Japanese (ja)
極端紫外線リソグラフィ
58.7469
5German (de)
EUV-Lithografie
48.0592
6Catalan (ca)
Fotolitografia ultraviolada extrema (electrònica)
28.4861
7Polish (pl)
Litografia EUV
26.6211
8Chinese (zh)
极紫外光刻
26.443
9Persian (fa)
لیتوگرافی فرابنفش فرین
19.4535
10Italian (it)
Litografia ultravioletta estrema
19.0029
More...

The following table shows the most popular language versions of the article.

Most popular in all the time

The most popular language versions of the article "Extreme ultraviolet lithography" in all the time
#LanguagePopularity awardRelative popularity
1English (en)
Extreme ultraviolet lithography
1 763 597
2German (de)
EUV-Lithografie
326 648
3Japanese (ja)
極端紫外線リソグラフィ
252 641
4Chinese (zh)
极紫外光刻
240 782
5Russian (ru)
Фотолитография в глубоком ультрафиолете
108 107
6French (fr)
Lithographie extrême ultraviolet
57 793
7Spanish (es)
Litografía ultravioleta extrema
31 450
8Italian (it)
Litografia ultravioletta estrema
17 163
9Persian (fa)
لیتوگرافی فرابنفش فرین
12 111
10Arabic (ar)
الأشعة فوق البنفسجية المتطرفة
2 818
More...

The following table shows the language versions of the article with the highest popularity in the last month.

Most popular in June 2025

The most popular language versions of the article "Extreme ultraviolet lithography" in June 2025
#LanguagePopularity awardRelative popularity
1English (en)
Extreme ultraviolet lithography
12 876
2Chinese (zh)
极紫外光刻
1 705
3German (de)
EUV-Lithografie
1 163
4Japanese (ja)
極端紫外線リソグラフィ
1 027
5Russian (ru)
Фотолитография в глубоком ультрафиолете
700
6French (fr)
Lithographie extrême ultraviolet
374
7Spanish (es)
Litografía ultravioleta extrema
351
8Polish (pl)
Litografia EUV
254
9Italian (it)
Litografia ultravioletta estrema
214
10Korean (ko)
극자외선 리소그래피
127
More...

The following table shows the language versions of the article with the highest Authors’ Interest.

The highest AI

Language versions of the article "Extreme ultraviolet lithography" with the highest Authors Interest (number of authors). Only registered Wikipedia users were taken into account.
#LanguageAI awardRelative AI
1English (en)
Extreme ultraviolet lithography
165
2German (de)
EUV-Lithografie
54
3Japanese (ja)
極端紫外線リソグラフィ
24
4French (fr)
Lithographie extrême ultraviolet
21
5Chinese (zh)
极紫外光刻
20
6Italian (it)
Litografia ultravioletta estrema
18
7Russian (ru)
Фотолитография в глубоком ультрафиолете
15
8Persian (fa)
لیتوگرافی فرابنفش فرین
14
9Spanish (es)
Litografía ultravioleta extrema
13
10Arabic (ar)
الأشعة فوق البنفسجية المتطرفة
3
More...

The following table shows the language versions of the article with the highest Authors’ Interest in the last month.

The highest AI in June 2025

Language versions of the article "Extreme ultraviolet lithography" with the highest AI in June 2025
#LanguageAI awardRelative AI
1English (en)
Extreme ultraviolet lithography
5
2Basque (eu)
Muturreko litografia ultramore
2
3Polish (pl)
Litografia EUV
1
4Arabic (ar)
الأشعة فوق البنفسجية المتطرفة
0
5Catalan (ca)
Fotolitografia ultraviolada extrema (electrònica)
0
6German (de)
EUV-Lithografie
0
7Spanish (es)
Litografía ultravioleta extrema
0
8Persian (fa)
لیتوگرافی فرابنفش فرین
0
9French (fr)
Lithographie extrême ultraviolet
0
10Indonesian (id)
Litografi ultraviolet ekstrim
0
More...

The following table shows the language versions of the article with the highest number of citations.

The highest CI

Language versions of the article "Extreme ultraviolet lithography" with the highest Citation Index (CI)
#LanguageCI awardRelative CI
1English (en)
Extreme ultraviolet lithography
81
2German (de)
EUV-Lithografie
38
3Japanese (ja)
極端紫外線リソグラフィ
38
4Chinese (zh)
极紫外光刻
19
5Indonesian (id)
Litografi ultraviolet ekstrim
18
6Spanish (es)
Litografía ultravioleta extrema
16
7Russian (ru)
Фотолитография в глубоком ультрафиолете
16
8French (fr)
Lithographie extrême ultraviolet
15
9Persian (fa)
لیتوگرافی فرابنفش فرین
14
10Korean (ko)
극자외선 리소그래피
11
More...

Scores

Estimated value for Wikipedia:
English:
Global:
Popularity in June 2025:
English:
Global:
Popularity in all years:
English:
Global:
Authors in June 2025:
English:
Global:
Registered authors in all years:
English:
Global:
Citations:
English:
Global:

Quality measures

Interwikis

#LanguageValue
arArabic
الأشعة فوق البنفسجية المتطرفة
caCatalan
Fotolitografia ultraviolada extrema (electrònica)
deGerman
EUV-Lithografie
enEnglish
Extreme ultraviolet lithography
esSpanish
Litografía ultravioleta extrema
euBasque
Muturreko litografia ultramore
faPersian
لیتوگرافی فرابنفش فرین
frFrench
Lithographie extrême ultraviolet
idIndonesian
Litografi ultraviolet ekstrim
itItalian
Litografia ultravioletta estrema
jaJapanese
極端紫外線リソグラフィ
koKorean
극자외선 리소그래피
plPolish
Litografia EUV
ruRussian
Фотолитография в глубоком ультрафиолете
simpleSimple English
Extreme ultraviolet lithography
zhChinese
极紫外光刻

Popularity rank trends

Best Rank English:
#48132
09.2023
Global:
#49068
09.2023

AI rank trends

Best Rank English:
#4958
06.2017
Global:
#16749
03.2019

Local AI rank history

Languages comparison

Important global interconnections (July 2024 – June 2025)

Wikipedia readers most often find their way to information on Extreme ultraviolet lithography from Wikipedia articles about ASML Holding, TSMC, Photolithography, 3 nm lithography process and Extreme ultraviolet. Whereas reading the article about Extreme ultraviolet lithography people most often go to Wikipedia articles on ASML Holding, Photolithography, Extreme ultraviolet, 3 nm lithography process and Next-generation lithography.

Cumulative results of quality and popularity of the Wikipedia article

List of Wikipedia articles in different languages (starting with the most popular):

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About WikiRank

The WikiRank project is intended for automatic relative evaluation of the articles in the various language versions of Wikipedia. At the moment the service allows to compare over 44 million Wikipedia articles in 55 languages. Quality scores of articles are based on Wikipedia dumps from July, 2025. When calculating current popularity and AI of articles data from June 2025 was taken into account. For historical values of popularity and AI WikiRank used data from 2001 to 2025... More information